Linear positioning stage MT53

piezoelectric1-axisprecision

MT53 High-resolution micro stage Application: multi purpose micro stage Benefit: for high resolution scanning Features: positioning with very high resolution • Vacuum: all pressure ranges HV /UHV down to 10E-11 mbar • Lubrication: liquid down to 10E-8mbar / dry lube down to 10E-11mbar • Magnetism: magnetic • Max. bake-out temperature: 120°C Options: • Material selection and vacuum lubrication adapted to the application • Individual adaptation to the installation situation in the chamber • Optional with controller FMC400/450 Technical Data: • Travel: 10 mm • Repeatability: - ± 0.2 µm (unidirectional) ± 0.3 µm (bidirectional) • Load: → 5 N / ↑ 8.8 N • Max. Speed: 0.2 mm/s • Motor: Piezo Motor • Bearing: cross roller bearings • Feedback: Linear Scale • Feedback Resolution: ± 0.1µm