- Company
- Products
- Catalogs
- News & Trends
- Exhibitions
Linear positioning stage MT53piezoelectric1-axisprecision
Add to favorites
Compare this product
Characteristics
- Orientation
- linear
- Type
- piezoelectric
- Number of axes
- 1-axis
- Other characteristics
- precision, aluminum, miniature, industrial, vacuum-compatible, for wafer handling, crossed roller
- Stroke
Min.: 1 mm
(0.039 in)Max.: 10 mm
(0.394 in)- Speed
Min.: 0.2 mm/s
Max.: 10 mm/s
- Repeatability
Min.: 0.2 µm
Max.: 5 µm
- Load
Min.: 0.5 kg
(1.1 lb)Max.: 0.9 kg
(1.98 lb)
Description
MT53
High-resolution micro stage
Application: multi purpose micro stage
Benefit: for high resolution scanning
Features: positioning with very high resolution
• Vacuum: all pressure ranges HV /UHV down to 10E-11 mbar
• Lubrication: liquid down to 10E-8mbar / dry lube down to 10E-11mbar
• Magnetism: magnetic
• Max. bake-out temperature: 120°C
Options:
• Material selection and vacuum lubrication adapted to the application
• Individual adaptation to the installation situation in the chamber
• Optional with controller FMC400/450
Technical Data:
• Travel: 10 mm
• Repeatability: -
± 0.2 µm (unidirectional)
± 0.3 µm (bidirectional)
• Load: → 5 N / ↑ 8.8 N
• Max. Speed: 0.2 mm/s
• Motor: Piezo Motor
• Bearing: cross roller bearings
• Feedback: Linear Scale
• Feedback Resolution: ± 0.1µm
Catalogs
No catalogs are available for this product.
See all of Steinmeyer Holding GmbH‘s catalogsOther Steinmeyer Holding GmbH products
Cleanroom, Vacuum & Beam Positioning Stages: Linear Stages, Lifting Stages, XY Stages, Rotary Stages
Related Searches
- Steinmeyer positioning stage
- Steinmeyer linear positioning stage
- Steinmeyer motorized positioning stage
- Steinmeyer precision positioning stage
- Steinmeyer 1-axis positioning stage
- Manual stage
- Steinmeyer compact positioning stage
- Steinmeyer 2-axis positioning stage
- XY stage
- Steinmeyer rotary positioning stage
- Multi-axis stage
- Steinmeyer aluminum positioning stage
- High-accuracy stage
- Steinmeyer piezoelectric positioning stage
- Steinmeyer industrial positioning stage
- Micrometer-driven stage
- Ball screw stage
- 3-axis stage
- Vertical stage
- XYZ stage
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.