Linear positioning stage KDT120

piezoelectric2-axisprecision

KDT120-20 High resolution XY stage Application: vacuum-XY-stage Benefit: fast and high resolution Features: parameters for yaw and pitch three times better than the variant with aperture - Vacuum: all ranges HV / UHV / EUV up to 10E-11 mbar - Lubrication: liquid up to 10E-8 / dry up to 10E-11 mbar - Magnetism: magnetic / low magnetic / magnet free - Max. Bakeout temperature: 120°C Options: - With and without aperture - Available as magnetic, low-magnetic and magnet-free versions - Different motor variants: Nanomotion or piezo motor - Combinable with XYZ positioning system (e.g. MT105) - Combinable with rotary stages (e.g. DT105) for rotary applications - Optional with controller FMC400/450 Technical Data: - Travel: 24 mm - Repeatability: - ± 0.03 µm (unidirectional) - ± 0.05 µm (bidirectional) - Load: → 5 N / ↑ 45 N - Max. Speed: - 5 mm/s - Motor: Piezo Motor - Bearing: cross roller bearings stainless steel, hybrid, optional full ceramic - Feedback: Linear Scale - Feedback Resolution: 0.005 µm – 0.1µm