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Linear positioning stage HT240electric1-axisprecision
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Characteristics
- Orientation
- linear
- Type
- electric
- Number of axes
- 1-axis
- Other characteristics
- precision, aluminum, vacuum-compatible, for wafer handling, open-loop, crossed roller
- Stroke
Min.: 1 mm
(0.039 in)Max.: 25 mm
(0.984 in)- Speed
Min.: 1 mm/s
Max.: 3.4 mm/s
- Repeatability
Min.: 0.3 µm
Max.: 5 µm
- Load
Min.: 0.5 kg
(1.1 lb)Max.: 44 kg
(97 lb)
Description
HT240
Precise high load vertical lifting stage
Application: Vacuum lifting stage
Benefit: high stiffnes and load
Features: wedge with ball screw spindle
• Vacuum: all ranges HV / UHV / EUV up to 10-11 mbar
• Lubrication liquid up to 10-8 / dry up to 10-11 mbar
• Magnetism: magnetic
• Max. Bakeout temperature: 120°C
Option:
• Material selection and vacuum lubrication adapted to the application
• Individual adaptation to the installation situation in the chamber
• Optional with controller FMC400/450
Technical Data
• Travel: - 25 mm
• Repeatability: -
± 1.7 µm, ± 0.3 µm (unidirectional)
± 2.7 µm, ± 0.5 µm (bidirectional)
• Load: → 440N / ↑ 410 N
• Max. Speed: 3.4 mm/s
• Motor: Piezo Motor
• Bearing: Cross roller stainless steel, hybrid
• Feedback: Linear Scale
• Feedback Resolution: 1 µm
Catalogs
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Cleanroom, Vacuum & Beam Positioning Stages: Linear Stages, Lifting Stages, XY Stages, Rotary Stages
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.