Linear positioning stage HT240electric1-axisprecision
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Characteristics
- Orientation
- linear
- Type
- electric
- Number of axes
- 1-axis
- Other characteristics
- precision, aluminum, vacuum-compatible, for wafer handling, open-loop, crossed roller
- Stroke
Max.: 25 mm
(0.984 in)Min.: 1 mm
(0.039 in)- Speed
Max.: 3.4 mm/s
Min.: 1 mm/s
- Repeatability
Max.: 5 µm
Min.: 0.3 µm
- Load
Max.: 44 kg
(97 lb)Min.: 0.5 kg
(1.1 lb)
Description
HT240
Precise high load vertical lifting stage
Application: Vacuum lifting stage
Benefit: high stiffnes and load
Features: wedge with ball screw spindle
• Vacuum: all ranges HV / UHV / EUV up to 10-11 mbar
• Lubrication liquid up to 10-8 / dry up to 10-11 mbar
• Magnetism: magnetic
• Max. Bakeout temperature: 120°C
Option:
• Material selection and vacuum lubrication adapted to the application
• Individual adaptation to the installation situation in the chamber
• Optional with controller FMC400/450
Technical Data
• Travel: - 25 mm
• Repeatability: -
± 1.7 µm, ± 0.3 µm (unidirectional)
± 2.7 µm, ± 0.5 µm (bidirectional)
• Load: → 440N / ↑ 410 N
• Max. Speed: 3.4 mm/s
• Motor: Piezo Motor
• Bearing: Cross roller stainless steel, hybrid
• Feedback: Linear Scale
• Feedback Resolution: 1 µm
Catalogs
No catalogs are available for this product.
See all of Steinmeyer Holding GmbH‘s catalogsExhibitions
Meet this supplier at the following exhibition(s):
Precision Fair 2024
13-14 Nov 2024 Brabanthallen, 's-Hertogenbosch - The Netherland (Netherlands)
More information
Other Steinmeyer Holding GmbH products
Cleanroom, Vacuum & Beam Positioning Stages: Linear Stages, Lifting Stages, XY Stages, Rotary Stages
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.