XYZ positioning system 3-Achs-Strahljustage

linearpiezo

3-Achs-Strahljustage UHV XYZ-System Application: High resolution and fast scanning applications Benefit: - Fast positioning in UHV, also vertically Features: Outstanding resolution, very slim, with internal motor • Vacuum: all areas HV / UHV up to 10E-11 mbar • Magnetism: magnetic | low-magnetic | magnet-free • Lubrication: liquid up to 10E-8 / dry up to 10E-11 mbar • Max. bakeout temperature: 120°C Options: • Material selection and vacuum lubrication adapted to the application • Can be combined to a XYZ transfer system (e.g. LA90, LA95, LA170) • Individual adaptation to the installation situation in the chamber • Optionally with controller FMC400/450 • Optional with motion controller FMC400/450 Technical Data: • Travel: 5 mm, 10 mm • Repeatability: - ± 0.2 µm (unidirectional) ± 0.3 µm (bidirectional) • Load: → 5 N / ↑ 8.8 N • Max. Speed: 10 mm/s • Motor: Piezo Motor • Bearing: cross roller bearings stainless steel, hybrid, optional full ceramic • Feedback: Linear Scale • Feedback Resolution:0.1 µm, optionally up to 0.005 µm