Linear positioning stage MT53

piezoelectric1-axiscrossed roller

MT53 High-resolution micro stage: The smallest stage in the Steinmeyer Mechatronik product range offers very high resolution. Thanks to its miniaturized design, it is ideal for applications where space requirements are limited and which demand high standards. Optimal step sizes thanks to the piezo motor: The MT53 is equipped with cross roller bearings and a piezo motor, allowing steps in the nanometer range. In the vacuum and non-magnetic version, this micro stage is perfectly suitable for use in demanding environments. Ideal for micromachining and micro assembly: The MT53 can be in demanding micromachining and micro assembly applications. It can also be ideally deployed in research and development applications or in the semiconductor industry. Technical Data: • Travel: 10 mm • Repeatability unidirectional: ± 0.2 µm • Repeatability bidirectional: ± 0.3 µm • Accuracy: ± 0.8 µm • Position speed: 5 mm/s • Max. acceleration: 0.1 m/s2 • Max. Load Fx: 5 N • Max. Load Fy: 8.8 N • Max. Load Fz: 8.8 N