Rotary positioning stage DT65

motorizedwith controller

HV / UHV, DUV, Cleanroom ISO 6, unlimited travel, rep up to 0.003°, speed up to 540°/s, load up to 1 kg • Clean room: variants up to class ISO 6 (higher on request) • Vacuum: all ranges HV / UHV up to 10-11 mbar • Lubrication: liquid up to 10-8 mbar / dry up to 10-11 mbar • Max. Bakeout temperature: 100°C Optionally configurable: • Magnetic and low magnetic variants available • Material selection and lubrication adapted to the application • Optional with controller FMC400/450 • Customized development with 3D design, prototypes, series production Small, highly dynamic rotary stage The smallest vacuum rotation stage in the product portfolio impresses with its high dynamics and speed. In vacuum and low-magnetic design, the DT65 is perfectly suited for applications in demanding environments. It is therefore used in particular in research and development as well as in experimental physics. It can be combined into demanding multi-axis systems and can be easily controlled via our FMC 400/450 controllers.   Fields of application Research and development, setup of multi-axis systems, beamline instrumentation, synchrotron, materials research, materials analysis, wafer inspection, semiconductor quality control, semiconductor research