XYZ positioning stage MP53

piezoelectric3-axiscrossed roller

Fast, precise micropositioner HV / UHV / EUV, 20 - 50 mm travel, 0.2 µm repeatability, 1 kg load • - Vacuum: all ranges HV / UHV / EUV • - Lubrication liquid up to 10-8 / dry up to 10-11 mbar • - Max. Bakeout temperature: 120°C Optionally configurable: • - Available as magnetic, low-magnetic and magnet-free versions • - Different motor variants: Piezo motor or nanomotion • - Optionally with high-resolution measuring system for repeatability up to 0.005 µm • - Can be combined with rotary tables for rotary applications • - Individual adaptation to the installation situation in the chamber • - Version for clean room ISO 14644-1 (up to class 1 on request) • - Optionally with controller FMC400/450 Miniaturized XYZ manipulator for high precision or dynamic applications The manipulator is a highly dynamic 3-axis system for X, Y and Z movement in very limited installation space. Strokes up to 50 mm are realized. The manipulator is equipped with piezo motors and can thus realize positioning increments of a few nanometers for high-precision applications in high vacuum and ultra-high vacuum. Optionally equipped with a nanomotion, it is particularly suitable for highly dynamic and high-precision positioning. Application areas Precision positioning in very small spaces for laboratory applications, microscopy and semiconductor technology, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scanning, sample handling, camera adjustment, sensor adjustment, materials research, materials analysis, beamline, accelerator, synchrotron, miniaturization