Linear positioning stage LA97-MT85

piezoelectric2-axisprecision

Precise verticalLA97-MT85 Application: Multi-purpose manipulator Benefit: for high-resolution scanning Features: Positioning with very high resolution • - Vacuum: all pressure ranges HV / UHV up to 10-11 • - Magnetism: magnetic • - Lubrication: liquid up to 10E-8 / dry up to 10E-11 mbar • - Max. Bake-out temperature: 80°C Options: • - Material selection and vacuum lubrication tailored to the application • - Individual adaptation to the installation situation in the chamber • - Optionally with FMC400/450 control unit • - Technical data • - Travel range: 20 mm - 200 mm • - Repeat accuracy: ± 0.02 µm (unidirectional) ± 0.03 µm (bidirectional) • - Load: → 200 N / ↑ 20 N • - Max. Speed: 10 mm/s • - Motor: Piezo motor • - Guide: Cross roller bearing stainless steel, hybrid, optional ceramic • - Feedback: Linear measuring system • - Resolution measuring system: 0.001 µm - 0.1 µm