Electric manipulator 3LT300

vacuumpositioning3-axis

3-axis manipulators from three LT300 Application: HV 3-axis positioning system Benefit: extremely stable when reaching the position, dry double Features: Stabilization with piezo brake • - Vacuum: all pressure ranges HV / UHV up to 10-11 • - Magnetism: magnetic • - Lubrication: liquid up to 10E-8 / dry up to 10E-11 mbar • - Max. Bake-out temperature: 120°C Options: • - Material selection and vacuum lubrication tailored to the application • - Individual adaptation to the installation situation in the chamber • - Optionally with FMC400/450 control unit Technical data • - Travel range: 10 mm - 100 mm • - Repeat accuracy: ± 4 µm (unidirectional) ± 5µm (bidirectional) • - Load: → 200 N / ↑ 20 N • - Max. Speed: 10 mm/s • - Motor: Piezo motor • - Guide: Cross roller bearing, stainless steel, hybrid • - Feedback: Linear measuring system, open loop • - Resolution measuring system: 0.001 µm - 0.1 µm