Focus linear stage
HV / DUV, cleanroom ISO 6, travel 25 - 50 mm, rep 1.6 µm, speed 60 mm/s, load 4 kg
• - Vacuum: all ranges HV up to 10-8 mbar
• - Cleanroom: variants up to class ISO 6 (higher on request)
• - Lubrication liquid up to 10-8 mbar
• - Max. Bakeout temperature: 100°C
Optionally configurable:
• - Optionally with linear scale for repeatability up to 0.3 µm as well as position feedback
and monitoring
• - Nickel-plated aluminum parts for increased hygiene requirements in medical technology
and the pharmaceutical industry on request
• - Special lubrication for clean room, vacuum, pharma or food industry
• - Customized development with 3D design, prototypes, series production
• - Easy to integrate for horizontal and vertical applications
The compact and robust linear stage is easy to integrate for demanding low-emission applications in cleanroom, vacuum and high vacuum. It convinces with an optimal price-performance ratio with tested exceptionally high durability. For this reason, this linear stage is favored for large and small series.The robust, very stable base structure, ground to highest flatness, allows excellent overrun values and enormous stiffness for maximum resolutions.It has a special motor with minimum outgassing values and for use under elevated temperatures. In addition, it has a compact, non-contact switching PCB switch for the end position, outgassed to 10E-8mBar.
Optinally, an individual special configuration for increased clean room conditions and for use in biotechnology, medical technology, food industry and pharmaceutical technology is possible.