Linear positioning stage MT130

electric1-axisprecision

MT130 EUV miniature linear stage 155 x 130 x 43 mm, UHV / DUV / EUV, ISO 5, travel up to 50 mm, rep 2.3 µm, load 9 kg, speed 40 mm/s • - Cleanroom: variants up to class ISO 5 (higher on request) • - Vacuum: all HV / UHV ranges • - Beam: EUV, DUV, UV • - Lubrication liquid up to 10-8 / dry up to 10-11 mbar • - Max. Bake-out temperature: 120°C Options: • - Stackable to form a compact 3-axis positioning system: MP130-3 • - Combinable with the DT130 rotary stage • - Travel range up to 80 mm • - High-resolution measuring system • - EUV lubrication, flour-free / PFAS-free UHV lubrication • - Customized development with 3D design, prototypes, series production Compact EUV linear axis with internal motor The miniature linear stage achieves very good running values with backlash-free cross roller bearing. The drive is integrated into the highly compact positioning system. The positioning system is also equipped with a permanent magnetic brake. Fields of application Positioning in small dimensions in EUV cleanrooms, e.g. camera, microscope / sensor (AFM, WLI), construction of space-saving XYZ multi-axis systems, aligner for industry and research, compact cleanroom positioning systems, wafer inspection, wafer probe alignment