Linear positioning stage MT85

piezoelectric1-axisprecision

MDT85-PM Vacuum / Cleanroom linear stages and axes • - Cleanroom: variants up to class ISO 6 (higher on request) • - Vacuum: all HV / UHV ranges • - Beam: UV / DUV / EUV • - Lubrication: liquid up to 10-8 / dry up to 10-11 mbar • - Max. Bake-out temperature: 140°C Options: • - With or without aperture (Ø 25 mm) • - Stackable to a compact 3-axis positioning system • - Magnetism: magnetic, low-magnet, magnet-free • - EUV lubrication, flour-free / PFAS-free UHV lubrication • - Customized development with 3D design, prototypes, series production Fields of application Positioning in small dimensions in the EUV cleanroom e.g. camera, microscope / sensor (AFM, WLI), transillumination measurements, microscopy positioning, setup of space-saving XYZ multi-axis systems, manipulator for industry and research, compact cleanroom positioning systems, semiconductor alignment, beam inspection