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Linear positioning stage MT85piezoelectric1-axisprecision
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Characteristics
- Orientation
- linear
- Type
- piezoelectric
- Number of axes
- 1-axis
- Other characteristics
- precision, industrial, for wafer handling
- Stroke
Max.: 50 mm
(1.969 in)Min.: 25 mm
(0.984 in)- Speed
Max.: 5 mm/s
Min.: 2.5 mm/s
- Repeatability
Max.: 0.3 µm
Min.: 0.2 µm
- Load
Max.: 15 kg
(33.07 lb)Min.: 6 kg
(13.23 lb)
Description
MDT85-PM
Vacuum / Cleanroom linear stages and axes
• - Cleanroom: variants up to class ISO 6 (higher on request)
• - Vacuum: all HV / UHV ranges
• - Beam: UV / DUV / EUV
• - Lubrication: liquid up to 10-8 / dry up to 10-11 mbar
• - Max. Bake-out temperature: 140°C
Options:
• - With or without aperture (Ø 25 mm)
• - Stackable to a compact 3-axis positioning system
• - Magnetism: magnetic, low-magnet, magnet-free
• - EUV lubrication, flour-free / PFAS-free UHV lubrication
• - Customized development with 3D design, prototypes, series production
Fields of application
Positioning in small dimensions in the EUV cleanroom e.g. camera, microscope / sensor (AFM, WLI), transillumination measurements, microscopy positioning, setup of space-saving XYZ multi-axis systems, manipulator for industry and research, compact cleanroom positioning systems, semiconductor alignment, beam inspection
Catalogs
No catalogs are available for this product.
See all of Steinmeyer Holding GmbH‘s catalogsOther Steinmeyer Holding GmbH products
Cleanroom, Vacuum & Beam Positioning Stages: Linear Stages, Lifting Stages, XY Stages, Rotary Stages
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.