Linear positioning stage PLT240

electric1-axisprecision

PLT240 Precise high-load linear stage HV / UV / DUV, ISO 6, travel 50 - 850 mm, load 100 kg, rep 0.4 µm, width 240 • - Cleanroom: variants up to class ISO 6 (higher on request) • - Vacuum: all areas in high vacuum, lubrication liquid up to 10-7 • - Max. Bake-out temperature: 80°C Options • - Lead screw with dry lubrication or ball screw with liquid lubrication • - Design for cleanroom, vacuum and beam • - Nitrogen atmosphere design • - Customized development with 3D design, prototypes, series production • - Optional with FMC400/450 controller Fields of application Semiconductor manufacturing & handling, high-load DUV positioning, positioning for scanning applications, transfer positioning, semiconductor technology, ultra-high vacuum, vacuum chambers, research, beamline instrumentation, electronics assembly and inspection