Linear positioning stage KT106/170

electric1-axisprecision

KT106/170 XY Sample Stage HV / UV / DUV, ISO 4, Travel 136 x 170 mm, Rep 2.9 µm, Load 5 kg, Speed 20 mm/s • - Cleanroom: variants up to class ISO 4 (higher on request) • - Vakuum: all ranges HV up to10-7 mbar • - Lubrication: liquid up to 10-7 mbar • - Max. Bakeout temperature: 100°C • - Optimized price-performance ratio Options: • - Can be combined with rotary stages (e.g. DT105) • - Version for clean room, laboratory or production • - Customer-specific development with 3D design, prototypes, series production • - Optionally with FMC400/450 motion controller Fields of application Positioning for semiconductor technology, micro- or nanofabrication, mass spectrometer, photoelectron spectrometers, laboratory applications, microscopy, research in high vacuum, sample preparation, sample scanning, sample handling, wafer inspection, material research, material analysis