Wafer inspection and metrology positioning system KT470-SM

XYZlinearfor clean rooms

This inspection system consists of the XY-Stage KT470 on a granite structure with a manual Z-vertical unit. This combination is suitable for the flexible and modular design of production systems / inline processes for cleanrooms and can be optionally extended with rotary or motorized Z-axes. Ideal for flexible inspection processes of wafers up to 12 inch / 300 mm Holder for exchangeable process heads (microscope, sensor, ...) Various scanning ranges and manual height adjustment (optionally motorized with motion controller) Low maintenance for 24/7 production up to cleanroom class ISO 6 (higher on request) Options: Extendable travel range XY 200 - 350 mm, Z 200 - 400 mm Adaptation to the process: aperture, sample holder, extension of additional (motorized) Z-axes Adapted vibration decoupling by means of damping rubber intermediate layer or pneumatic dampers Safety concept and technology (emergency stop, door switch, light curtain, laser scanner, STO, SLS) Customized design with frame, enclosure or integration into the fab Customer-specific development with 3D design, prototypes, series production