Air bearing positioning stage LA340-EDLM series

linearlinear motor-driven1-axis

The LA340 linear stage, with a width of 340 mm, is based on a granite plate and was constructed with air bearings. This allows it to be used for all applications that require perfect flatness, the smallest tolerances for pitch and yaw as well as smooth running characteristics. • Ideal for scanning applications or high-precision positioning • Very high repeatability up to ± 0.3 µm • High dynamics at speeds up to 2060 mm/s • Load capacity up to 500 N • Perfect flatness with up to ± 0.8 µm • Extra long lifetime • Clean room variant available High dynamics with perfect planarity The drive concept of this linear axis is based on a dynamic linear motor and a linear measurement system, whereby high speeds and accelerations are achieved with high precision and excellent repeatability. Fields of application Precision positioning in metrology, inspection, laser machining, photonics, precision scanning, semiconductor or flat panel display manufacturing