Vacuum-compatible stage MT105 series

linearpiezolinear motor-driven

• Vacuum: all ranges HV / UHV / EUV up to 10E-11 mbar • ubrication liquid up to 10E-8 / dry up to 10E-11 mbar • Max. Bakeout temperature: 120°C Optionally configurable: • Available as magnetic, low magnetic and magnetic-free version • With up to 2 different motors for motion of high loads • Different motor variants: Nanomotion, piezo motor or linear motor • Combinable with the XYZ positioning system • Combinable with rotary tables (e.g. DT105) for rotary applications • Individual adaptation to the installation situation in the chamber • Version for clean room ISO 14644-1 (up to class 1 on request) • Optional with controller FMC400/450 Flexible and universal for demanding environmental conditions The MT105 is a universally applicable micro stage that impresses above all with its high dynamics and speed. It is designed to achieve excellent running and positioning accuracies under extreme conditions, such as in high vacuum, ultra-high vacuum and for non-magnetic applications. Optionally, the micro stage can be equipped with two motors to position higher loads. Fields of application Semiconductor technology in ultra-high vacuum and under extreme ultraviolet radiation, wafer alignment, camera alignment, sensor alignment, inspection of contacts, alignment of mirrors, probing, vacuum chambers, research, beamline instrumentation, electronics assembly and inspection, high precision scanning applications, microassembly