Vertical positioning table HDT255 series

motorizedprecisionfor heavy loads

• Vacuum: all ranges HV / UHV / EUV up to 10-11 mbar • Lubrication liquid up to 10-8 / dry up to 10-11 mbar • Max. Bakeout temperature: 120°C • Clean room class 4 ISO 14644-1 (up to class 1 on request) • Available as magnetic version Optionally configurable: • With or without aperture • Different travels • Optionally with and without measuring system • Versions for clean room ISO 14644-1 (up to class 1 on request) • Material selection and vacuum lubrication adapted to the application • Individual adaptation to the installation situation in the chamber • Optionally with controller FMC400/450 Precise lifting stage for high loads The lifting stage with aperture is suitable for high-precision vertical movements under extreme conditions, such as in high vacuum, ultra-high vacuum and under extreme ultraviolet radiation. Due to its lift-wedge principle, it achieves its parameters despite a low overall height of 125 mm. The combination of stepper motor and a precise ball screw, optionally sliding screw, allows smallest step sizes at comparatively high loads. Application areas Fields of application Precision positioning in industry and research in ultra-high vacuum and under extreme ultraviolet radiation, alignment and inspection of wafers, probe cards and printed circuit boards, surface analysis, layer thickness measurement, camera alignment, materials research, materials analysis, inspection, microscopy in vacuum, beamline, accelerator, synchrotron