High-accuracy stage HT160 series

verticalmotorizedvacuum-compatible

• Vacuum: all ranges HV / UHV / EUV up to 10E-11 mbar • Lubrication liquid up to 10E-8 / dry up to 10E-11 mbar • Max. Bakeout temperature: 120°C • Available as magnetic version • Clean room class 4 according to ISO 14644-1 Optionally configurable: • Material selection and vacuum lubrication adapted to the application • Individual adaptation to the installation situation in the chamber • Version for clean room ISO 14644-1 (up to class 1 on request) • Optional with controller FMC400/450 Precise lifting stage for high loads The lifting stage is suitable for high-precision vertical movements under extreme conditions, such as in high vacuum, ultra-high vacuum. Due to its lift-wedge principle, it achieves its parameters despite its low overall height. The combination of gearmotors and a precise ball screw, optional lead screw, enables smallest step sizes at comparatively high loads. Application areas Precision positioning in industry and research in ultra-high vacuum and under extreme ultraviolet radiation, wafer alignment, camera alignment, materials research, materials analysis, microscopy in vacuum, beamline, accelerator, synchrotron