Wafer inspection and metrology positioning system 782430:002.26

XYZlinearfor clean rooms

This inspection system consists of four cleanroom axes and enables automated measurement of multiple objects simultaneously. High dynamics and highest reproducibility are achieved. A high-resolution camera or sensor is moved relative to the sample to inspect geometries, perform measurements and document special quality features. Automated and low-maintenance 24/7 inspection • Ideal for automated inspection of wafers, probe cards and printed circuit boards • Inspection of multiple objects simultaneously through travels up to 720 mm • Ideal for integration of two processes simultaneously • Low-maintenance 24/7 operation and flexible maintenance concept due to fast system exchange on the granite structure Optionally expandable: • Version for clean room ISO 14644-1 (up to class 1 on request) • Connections for exhaust and revolving belt covers • Available also as single portal • Ready-to-use control system with pre-configured controller incl. sample software