XYZ positioning system 782481:001.26

portalfor wafer inspection and metrologyfor microscopy

XYZ AFM gantry for wafer inspection, microscopy | travel up to 550 x 1550 mm | air bearing, ball screw, belt, stepper motor Highly stable AFM air bearing gantry with large travel ranges This very rigid XYZ gantry is specially designed for high-precision atomic force microscopy (AFM) examination of particularly large glass samples. Above the u-shaped sample platform is a movable cantilever in Z for the customized AFM. The cantilever can be precisely aligned with the sample and moved to any point within the U-shape for surface relief acquisition. The air bearing provides excellent in-plane positioning accuracy. The maximum sample weight is 500 kg. Atomic stability for demanding measurements · Ideal for highly rigid and precise measurements without the influence of vibration · High throughput due to travels of 150 x 275 x 50 mm, expandable to 550 x 1550 x 50 mm · Extreme stability at standstill of 5 nm and better · Outstanding long lifetime due to the use of wear-free air bearings Optionally expandable: · Integration of further sensors into the process · Customized adaptation of traverse paths, length combination, cabling and control system · Feet for additional protection against building vibrations · Versions for clean room ISO 14644-1 (up to class 1 on request) · Connections for exhaust · Special configuration for biotechnology, medical technology, pharmaceuticals, semiconductors · Optional with pre-configured controller incl. exemplary software for immediate use