XYZ positioning system 217999

linearfor wafer inspection and metrologywith DC motor

XYZ measuring system for variable and moving loads | XYZ ball screw, cross roller, DC motor, linear measuring system High-precision measurements even with variable loads This XYZ positioning system is specially designed for high-precision measurements of variable loads and moving objects. If objects of different weight classes have to be measured one after the other, conventional measuring stages quickly reach their limits. This XYZ measuring system provides a solution to this problem. Perfect flatness and straightness for samples up to 30 kg · Ideal for part measurements or the capture of 3D profiles on high parts · Load-independent high-precision measurements of ± 1 µm, even with moving objects · Drastic reduction of measurement errors to below 5 µrad · Perfect straightness with ± 0.5 µm and planarity at ± 1 µm · Flatness independent interface and adjustment possibilities Optionally configurable: · Different motor variants: DC motor or stepper motor · Rotational movements in combination with DT130 or DT200 · Special configuration for biotechnology, medical technology, pharmaceuticals, semiconductors · Versions for clean room ISO 14644-1 (up to class 1 on request) · Read to use with pre-configured controller incl. exemplary software