3-axis positioning system 782300:113.26

XYZlinearfor wafer inspection and metrology

XYZ System for Laboratory and Wafer Inspection | Ball Screw, DC Motor, Cross Roller, Linear Measuring System High precision and modular 3-axis system This XY combination with separate Z-vertical unit consists of the high-precision and durable standard linear axes of the PMT160. This combination is suitable for all applications requiring perfect flatness, smallest tolerances for pitch and yaw, and smooth running behavior. The XYZ system is ready to use with controller as well as software and operates with reliable parameters. Flexible, instantly operational and tested · Ideal for setting up and expanding of your application · Highly precise repeatability up to 0.5 µm · Smallest steps and highest reliability at comparatively high positioning speed of 50 mm/s · Perfect flatness of ± 1 for positioning medium loads up to 150 N Optional expandable: · Different travels per axis from 50 - 300 mm · Rotational movements in combination with DT130 or DT200 · Various motor variants: DC motor, stepper motor, linear motor and nanomotion · Immediate use with pre-configured controller incl. exemplary software · Versions for clean room ISO 14644-1