Nanopositioning system for optical applications 782300:130.26

3-axisXYZlinear

XYZ positioning system for high precision automated optical inspection | ball screw, cross roller, DC motor, linear measuring system Highly stable non-contact optical measurement in the submicrometer range This 3-axis positioning system was developed for high-precision measuring applications in those cases where the XY stage moves the object being measured with extremely low pitch and yaw errors to the sensor or camera on the Z-axis. This is the case, for example, when measuring parts or recording 3D profiles even on tall parts. The XYZ system consists of the durable standard axes of the KT310 cross table and the PMT160 linear table on granite gantry. Highly accurate and consistent measurement results · Ideal for high-precision automated inspection processes · High repeatability up to 0.3 µm · Reduction of measurement errors to below 3 µm Flexibly configurable: · Travels up to 150 mm · Optionally in different measuring system resolutions · Rotational movements in combination with DT200 · Flatness-independent interface as well as adjustment options · Different motor variants: DC motor or stepper motor · Versions for clean room ISO 14644-1 · Ready-to-use control with pre-configured controller incl. sample software