X Phi system for the positioning of optical lenses, cylinders e.g. stylus gauge | X DC motor, ball screw, cross roller, linear measuring system | Phi AC servo, angle measuring system
Excellent stability for enormous resolutions
This X-Phi positioning system consists of high-precision and durable standard axes of the PMT160 linear stage and, for rotation, the DTS130-HM. It is ideal for measuring applications in which the specimen is moved precisely into measuring position and thus no additional feed axis is required.
Highly precise and reliable measurement results
· Ideal for optical measurement of round parts e.g. wafers, optics
· Saves the additional purchase of a loading axis due to high-precision rotary movements with stroke
· High repeatability up to 0.0017
· Moves 1.9 µm precisely with X into the measuring position
Optionally configurable:
· Travels up to 300 mm
· Base plate made of granite or aluminum
· Available with internal scale (270 mm)
· Can be combined with other rotary stages, e.g. DT200
· Versions for clean room ISO 14644-1 possible
· Immediate use with pre-configured controller incl. exemplary software