XYZ positioning system 782300:193.26

linearfor wafer inspection and metrologyfor quality control

XYZ system for inspection and quality control | XY DC motor, cross roller| Z DC motor, ball screw, linear measuring system High-precision inspection with minimum error rate The positioning system enables positioning along three linear axes. In this unit, a PMT160 linear stage is mounted on a KT470 cross table with an adapter bracket. It achieves low runout errors, in terms of straightness and flatness, which are achieved by using crossed rollers. This results in above-average repeatability, which is the basis for good compensation. This enables extremely high accuracy for measurement applications. Ideal for optical quality control · Very high runout accuracy and repeatability up to 0.3 µm · Positioning of loads up to 150 N with a cost-effective drive · High speeds up to 50 mm/s · Reduction of random errors to a minimum · Easy integration and flexible combination with existing camera systems and sensors Optional expandable: · Different travels in the Z-axis from 50 - 300 mm · Various motor variants: DC motor or stepper motor · Immediate use with pre-configured controller incl. exemplary software · Versions for clean room ISO 14644-1