Single-axis positioning system 782424:005.26

linearrotaryfor wafer inspection and metrology

X Phi positioning system for inspection of wafers, biological samples (clean room ISO 5) | rotary axis and linear stage - Inspection and Mikroscopy High-precision linear-rotatory positioning This X Phi system allows the positioning of samples (e.g. wafers, biological samples) at a precisely defined angle to the sensor or camera. It consists of a linear X-axis, the precise standard linear stage PMT160 with ball screw, and an integrated rotary unit with unlimited travel, driven by flat belts.For cleanroom suitability, the cable guides for both the centered measuring system and the moving rotary unit were housed within the linear system enclosure. Bellows seal off the system from the outside to prevent particle emission. Maintenance-free positioning system for clean rooms • Ideal for inspection tasks in semiconductor technology, biotechnology and the pharmaceutical industry • High precision measurement with repeatability up to 0.3 µm • Excellent flatness of the linear stage enables high-precision coating thickness measurement with only one sensor • Reduction of particle emission to ISO class 5 by housing and bellows • Maintenance-free, industrial continuous operation and simple system exchange on the base plate Optional expandable: • Further versions for clean room ISO 14644-1 (up to class 1 on request) • Base plate made of granite or aluminum • Hermetically sealed special motors with pharmaceutical approval • Versions for extreme environmental conditions e.g. radiation, vacuum • Expandable to customer specific complete application • Immediate use with pre-configured controller incl. exemplary software