Vacuum-compatible nanopositioning stage LA97 series

linearpiezoelectric1-axis

LA97 - Vacuum linear stages and axes Nanometer linear stage HV / UHV up to 10E-11, 100 - 300 mm travel, 0.02 µm repeatability, up to 10 kg load • Vacuum: all areas HV / UHV up to 10E-11 mbar • Lubrication: liquid up to 10E-8 mbar / dry up to 10E-11 mbar • Max. Bakeout temperature: 120°C Optionally configurable: • Magnetic, low-magnetic and magnet-free versions available • Material selection and vacuum lubrication adapted to the application • Individual adaptation to the installation situation in the chamber • Version for clean room ISO 14644-1 (up to class 1 on request) • Optional with controller FMC400/450 Horizontal and vertical nanometer positioning This vacuum linear axis is suitable for all HV / UHV ranges up to 10-11mbar. It is universally applicable, as it can also be used for vertical positioning tasks. It achieves extremely high resolutions and highest stiffness in vacuum. Depending on the load to be moved, 2 up to 6 motors can be used in pincer arrangement. Fields of application High precision scanning applications, micro assembly, semiconductor technology in ultra-high vacuum and under ultraviolet radiation, vacuum chambers, research, beamline instrumentation, electronics assembly and inspection