XY stage KDT600-EDLM

linear motor-driven2-axishigh-accuracy

Scanning stage with large aperture This large precision xy stage is designed for maximum repeatability. Accuracy can be achieved with compensation in a cost-saving manner, which is otherwise only reserved for air bearing systems.Polished cross roller guides are used for repeatability of straightness and flatness of + -0.15 µm. With the large transmitted light, large substrates can also be measured from both sides or with fluoroscopy. It also offers the option of differential measurement to take advantage of full sensor accuracy in measurement applications. Even when the stage is fully moved, an opening of at least 60mm x 60mm is always kept. Fastest scanning applications with high acceleration Extremely fast scan results by a positioning speed of 330 mm/s Scan high loads with an extreme resolution of 0.05 µm Cost-optimized to achieve the comparable performance of air bearing systems Maintenance-free operation up to 500,000 full strokes, afterwards only a simple relubrication is necessary - Life expectancy up to two million full strokes - integrated cable management, plug-in terminal Fields of application Fast scanning applications and dynamic web travel e.g. semiconductor inspection, measuring systems, automatic optical inspection (AOI), measuring devices, differential measurement, replacement for air bearing systems