XY stage KT510-SM

motorized2-axishigh-accuracy

High precise even under variable load conditions This XY positioning system was developed especially for measurement applications where pitch and yaw errors are disturbing. Even the smallest pitch and yaw errors can be minimized to 25 µrad over the entire travels of 200 mm. With short measuring paths of 10 mm, these can even be reduced by a factor of 5. Even with variable loads up to 30 kg, the cross table allows high-precision measurements by the robust plate design. The XY stage is driven by a motor-spindle combination consisting of a 2-phase stepper motor and a Steinmeyer ball screw with 1 mm pitch. Ideal for demanding measurement applications • High-precision positioning of variable loads up to 30 kg • Drastic reduction of measurement errors to 25 µrad (200 mm travel), with shorter travel distances up to 5 µrad (10 mm) • Perfect straightness and flatness with ± 1 Fields of application metrology, surface inspection, inspection systems, tool measurement