XY stage KT500-EDLM

linear motor-driven2-axishigh-accuracy

Flat, precise and fast The KT500 not only impresses with its very flat and compact design. Thanks to 350 mm travel, even large substrates and parts can be scanned over the entire surface. It is designed in such a way that all process parameters can be exactly repeated and a comparable performance of air bearing systems is achieved. Thanks to a cable interface that can be disconnected via a plug connection, simple installation and maintenance-free operation up to 500,000 full strokes is possible. Highly dynamic XY system with long lifetime • High-precision repeatability up to 0.3 µm • Time saved in start-stop operation by max. speeds up to 300 mm/s and an acceleration of 1G • Maintenance-free operation up to 500,000 full strokes, afterwards only a simple relubrication is necessary • Life expectancy up to two million full strokes • Available with up to two electrodynamic linear motors per direction: 2+2 motors for particularly fast scan results, 2+1 motors for equal dynamics Fields of application Fast scanning applications and dynamic web travel e.g. semiconductor inspection, measuring systems, automatic optical inspection (AOI), measuring devices, differential measurement, replacement for air bearing systems