High-precision inspection system for versatile measuring tasks
This 3-axis positioning system is designed for high-precision metrology applications where the stage moves the object to be measured to the sensor or camera on the Z-axis. The xy stage consists of the reliable KT310 with a DC motor design. Its concept with internal motors, cross roller guides and high-precision ball screws enables excellent precision with optimum use of the installation space.
Highly precise and consistent measurement results
• Ideal for automated sample inspection
• High precision repeatability up to 0.3 µm
• Reduction of measurement deviations to less than 3 µm
Optionally expandable:
• Various travels up to 200 mm
• With/without granite base
• With/without vibration decoupling
• Stepper motor, DC motor and in various measuring system resolutions
• Motorized Z-axis e.g. with MT130 or PMT 160
• Rotatory movements in combination with DT200
• Versions for clean room ISO 14644-1 (up to class 1 on request)
• Ready-to-use control with pre-configured controller incl. sample software