Ultra-high vacuum micro-positioning system MP53-3-PM-10-PM-L

3-axisXYZpiezo

MP53-3-PM - Vacuum compact multi axes systems High resolution micropositioner • HV / UHV / EUV, 10 mm travel, 0.2 µm repeatability, 0.5 kg load • Vacuum: all ranges HV / UHV / EUV • Lubrication liquid up to 10E-8 / dry up to 10E-11 mbar • Max. Bakeout temperature: 120°C Optionally configurable: • Available as magnetic, low-magnetic and magnet-free version • Optionally with high-resolution measuring system for repeatability up to 0.005 µm • Combinable with rotary stages for rotary applications • Individual adaptation to the installation situation in the chamber • Versions for clean room ISO 14644-1 (up to class 1 on request) • Optional with Controller FMC400/450 Miniaturized XYZ manipulator for demanding applications The MP53 manipulator is a miniaturized 3-axis system for X, Y and Z motion in very limited installation space. Travel ranges of 10 mm are realized. The manipulator is equipped with piezo motors and can thus realize positioning increments of a few nanometers for high-precision applications in high vacuum and ultra-high vacuum. Application areas Precision positioning on smallest installation space for laboratory applications, microscopy and semiconductor technology, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scan, sample handling, camera adjustment, sensor adjustment, material research, material analysis, beamline, accelerator, synchrotron, miniaturization