Flat XY stage with 60 mm travel, 90 mm aperture, 1.1 µm repeatability, 6 kg load
Symmetrical XY stage in plate architecture with aperture
The KDT180 is a universally applicable stage, which convinces with its extremely flat design and the large aperture of 90 x 90 mm. The aperture enables differential measurements excluding residual errors of the stage or transmitted light measurements. This stage is therefore particularly suitable for metrology and optical applications.
Compact and flat with large aperture
• Ideal for microscopy, inspection and measuring systems
• Precise repeatability up to 1.1 µm
• Optional as DC motor or stepper motor version
Fields of application
Applications in microscopy, metrology, optics, 3D imaging, autofocus systems, electronics assembly, optics positioning, sample positioning, semiconductor inspection, measurement systems, measuring equipment