High-accuracy stage KDT105 series

XYpiezo2-axis

The XY stage with aperture and cross roller bearings offers high dynamics and speed for applications in high vacuum, ultra-high vacuum and under extreme ultraviolet radiation. Compared to its size, it enables very small step sizes. Equipped with a piezo motor, it achieves the smallest steps in the nanometer range with an almost unattainable position stability. With a nanomotion, it achieves very high dynamics as well as high speeds and has a maximum service life with precision in the micrometer range. It can be easily combined with the MT105 lifting stage, thus offering many application possibilities. Fields of application Precision positioning for laboratory applications, microscopy and semiconductor technology, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scanning, sample handling, biochips, wafer inspection, wafer alignment, camera adjustment, materials research, materials analysis, beamline, accelerator, synchrotron