Ozone destructor CAT-O3 series

The CAT-O3 series of ozone destructs safely decompose high concentrations of ozone gas to sub-ppm levels that are below recommended ozone safety limits. The catalytic method of decomposition uses a metal oxide catalyst to passively convert the ozone to oxygen. The CAT-O3 series of ozone destructs are made from a welded stainless steel enclosure protected with a heat shield. They are carefully designed to meet the industry’s stringent safety performance requirements.​ Features - All welded construction - Self contained - Rapid reaction time - No consumables - No maintenance - Simple installation Semiconductor - CVD TEOS/Ozone - ALD - MOCVD - Ashers - Wet Benches - Spray Tools - Other