Field-free analytical UHR SEM for materials characterization at nanoscale
• Uncompromised characterization of all types of materials at the nanoscale
• Ideal for characterization of materials at low beam energies for maximum surface topography
• Excellent imaging of beam-sensitive and non-conductive samples
• Fully automated setup of electron beam – optimal imaging conditions are guaranteed by the In-Flight Beam Tracing™
• Intuitive live SEM navigation on the sample at magnification as low as 2× without the need of extra optical navigation camera thanks to the Wide Field Optics™ design
• Unique In-Beam Multidetector design allowing angle and energy selective BSE detection
• Intuitive software modular platform designed for effortless operation regardless of users’ skill level