UHR SEM for nanomaterials characterization at sub-nanometer scale
• High-resolution and high-contrast imaging of nextgen materials (e.g. catalyst structures, nanotubes, nanoparticles and other nanoscale structures)
• Excellent platform suitable for SEM/STEM metrology at sub-nanometer scale
• Fast setup of the electron beam – optimal imaging conditions are guaranteed by the In-Flight Beam Tracing™
• Multi-detector system TriBE™ and TriSE™ for sample nanocharacterization
• Intuitive software modular platform designed for effortless operation regardless users’ skill level