A unique combination of Plasma FIB and field-free UHR FE-SEM for multiscale materials characterization
• High throughput, large area FIB processing up to 1 mm
• Ga-free microsample preparation
• Ultra-high resolution, field-free FEG-SEM imaging and analysis
• In-lens SE and BSE detection
• Resolution optimization for high-throughput, multi-modal FIB-SEM tomography
• Superior field of view for easy navigation
• Essence™ easy-to-use, modular graphical user interface