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FIB/SEM microscope SOLARIS
for researchhigh-precisionultra-high resolution

FIB/SEM microscope
FIB/SEM microscope
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Characteristics

Type
FIB/SEM
Technical applications
for research
Other characteristics
high-precision, ultra-high resolution

Description

Advanced nanofabrication workbench for your research lab • Excellent ultra-high resolution SEM imaging • Best resolution Ga FIB column • High precision nanopatterning engine for electron and ion beams • Multi-gas injection system with a variety of precursor gases • Easy-to-use modular software user interface

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