Thermo Scientific Inspect 3D Software provides a user-friendly solution for alignment of tomographic image series (obtained with transmission electron microscopy or scanning transmission electron microscopy, TEM or STEM) along with energy dispersive X-ray spectroscopy (EDS) maps, producing a 3D reconstruction of the data. Inspect 3D Software also offers basic visualization functionality. All Thermo Scientific TEM, STEM and EDS tomography software are fully compatible with Inspects 3D Software.
Inspect 3D Software begins with a coarse X-Y alignment based on image cross-correlation. Alignment can be further refined with automated bead tracking or patch tracking procedures. Bead tracking traces multiple round particles on the specimen throughout the tilt series, correcting rotation and magnification changes for each image. Patch tracking traces multiple areas of the image throughout the tilt series and then combines the results.
Inspect 3D Software offers two classical algorithms for 3D volume reconstruction: weighted back projection (WBP) and simultaneous iterative reconstruction technique (SIRT). Additionally, Inspect 3D Software offers easy EDS-tomography reconstruction with simultaneous processing of STEM and EDS files, called HAADF-EDS bimodal tomography (HEBT), leading to enhanced elemental reconstruction.
Iterative reconstruction techniques offered with Inspect 3D Software include;
• Conjugate gradient least squares (CGLS)
• Expectation maximization (EM), in which elongation artifacts are significantly reduced when compared to SIRT reconstruction
• Simultaneous algebraic reconstruction technique (SART)