Smartline Vacuum transducer
Absolute pressure 1000 mbar to 5 x 10-9 mbar (=hPa), 750 Torr to 5 x 10-9 Torr
The compact VSM is a digital combination transducer (Pirani/cold cathode) measuring absolute pressure from atmosphere to ultrahigh vacuum. The Smartline transducers are controlled by a microprocessor that are capable of automatically managing the appropriate interaction of the vacuum sensors in terms of measurement ranges and switching points so that high accuracy can be achieved.
Your benefits:
• Extended measure range by combination of Pirani and cold cathode
• Extended range Pirani that permits operation of cold cathode at reduced pressure and enhanced lifetime
• Cold cathode sensor resistant to air infiltration
• Voltage reduction of cold cathodes optimizes durability of sensors
• Digital RS485 interface and analog output signal 1,819-8,6 V or EtherCAT
• Automatic baud rate detection 9.6 kBd to 115 kBd
• Optionally with big LCD display that is integrated with backlight display (VSM77DL, VSM79DL)
• Two independent potential free relay switch points
• Calibrated exchange sensor heads for quick and easy replacement
Typical applications:
• Mass spectrometry
• Coating plants and vapor deposition
• Measuring and controlling in fine and high vacuum
• Process engineering
• Sputtering plants
• Industrial furnaces