Absolute pressure 1000 mbar to 5e-10 mbar (=hPa), 750 Torr to 5e-10 Torr
The compact combination gauge VSH (Pirani/hot cathode) measures absolute pressure from atmosphere to ultra-high vacuum. The intelligence of internal microprocessors ensures a seamless transition between the two sensor principles and therefore high accuracy.
Your advantages
» Large measuring range thanks to Pirani/Bayard Alpert combination sensor
» Pirani with wide measuring range, allowing operation of the hot cathode at low pressure, ensuring optimized service life
» Excellent accuracy and reproducibility
» Bayard-Alpert with blowing resistant, yttrium coated double filament
» Digital RS485 interface plus 0-10 V output signal, EtherCAT or PROFINET
» Bluetooth adapter SLKBT enables wireless communication
» Automatic baud rate detection 9.6 kBd to 115 kBd
» Optionally with large, integrated LCD display with backlighting (VSH88DL, VSH89DL)
» Two independent, potential-free relay switch points
» Easily replaceable calibrated sensor heads
Examples of applications
» Analysis technology
» Evaporation and coating systems
» Measurement and control in the fine and high vacuum range
» Process engineering
» Vacuum furnaces
» Sputtering systems