Diamond grinding wheel for coarse & fine grinding of SiC wafers in longer life with reasonable cost.
*Work materials: Semiconductor wafer (SiC, GaN, GaAs, LT/LN)
*Application: Wafer grinding / Back grinding (Coarse & Fine grinding)
[Specifications]
*For coarse grinding
Diamond type: Synthetic diamond
Bonding: Porous vitrified bond
Abrasive grain size: Up to #4000
Concentration ratio: Up to 120
Tooth width: 2 - 4mm
Tooth height: Up to 6mm
Outer diameter: Up to 350mm
*For Fine grinding
Diamond type: Synthetic diamond
Bonding: Porous vitrified bond
Abrasive grain size: #5000 - #12000
Concentration ratio: Up to 120
Tooth width: 2 - 4mm
Tooth height: Up to 6mm
Outer diameter: Up to 350mm
Our porous vitrified bond wheel "VEGA" has both larger pore diameter and higher porosity than conventional wheels, maximizing the biting performance to work materials.
It is particularly suitable for wafer/back grinding of SiC wafers and can grind 6" SiC wafers without dressing. The excellent wear resistance increases the number of wafers that can be machined per wheel and contributes to the reduction of wafer machining costs.