The Trek Model 1100TN Electrostatic Force Microscope (EFM) enables voltage distribution measurements with a very high spatial resolution better than 10μm which is well beyond the capability of typical electrostatic voltmeters. Trek’s EFM can also measure voltage distribution across a much larger surface area as compared to a scanning probe microscope when operated under atmospheric conditions. Trek’s EFM employs a feedback voltage to the detector which is equal to the measured voltage thus preventing arcing between the detector and the surface under test.
Key Specifications
Voltage Range: ±1 kV
Voltage Sensitivity:
Accuracy: Better than 0.5% of full scale
Better than 100 mV
Incremental Step: 1 µm, minimum (detector)
Detector Tip: 5 µm X 5 µm
Measurement Area: 5 mm X 5 mm
Typical Applications Include
Measurement of antistatic bags, Si wafer
Electrophotography material testing
Photovoltaic materials evaluation
MEMS testing
Features and Benefits
Can be used in atmosphere conditions
Spatial resolution is better than 10 μm
Three measurement modes:
- Static
- Line Profile
- 3D Mapping