AC/DC power supply 640

variable-outputbenchtop

Trek’s Model 640 Electrostatic Chuck Optimizer system is a diagnostic tool which enables evaluation and optimization of waveforms/voltages for electrostatic chucks/clamps in order to minimize de-clamp time, maximize clamp force, and achieve optimum wafer processing for ESC systems. Model 640 combines two amplifiers (for two-phase voltage combinations) and a waveform generator, which can be independently programmed and configured to investigate, research, and discover the perfect power supply and waveform recipe to efficiently drive an ESC application. An electrostatic voltmeter (ESVM) is included to monitor residual voltage from the clamping/de-clamping process. Key Specifications Output Phasing: Voltage A: 0 to ±2 kV(4 kV p-to-p) Voltage B: 0 to ±2 kV(4 kV p-to-p) Output Current Range: 0 to ±5 mA DC with a peak capability of 10 mA Electrostatic Voltmeter Range: 0 to ±2 kV DC or peak AC Output Phasing: Resolution: 16 bit Samples per second: 250k Typical Applications Include Electrostatic-driven handling of materials Semiconductor wafer processing Non-mechanical transfer of flat panels or other processing materials sensitive to mechanical handling Features and Benefits Enables the creation of customized waveforms to be simple yet powerful, to generate the most complex waveforms that can be envisioned by the user The product’s software accepts parameters via arbitrary data input, pre-programmed waveforms, or user generated CSV files Accommodates one-phase or two-phase ESC systems Research is enhanced via three individually programmed stages to build the output