RF plasma generator TruPlasma Match 1000 (G2/13)

The new TruPlasma Match Series 1000 (G2/13) matchboxes represent the ideal complement to RF generators from TRUMPF Hüttinger. Their intelligent matching algorithm and digital control platform for process monitoring provide a comprehensive solution in which all of the components work together optimally – the TRUMPF RF system. Intelligent matching algorithm Fast, stable, and reproducible impedance matching to 50 ohms, even in critical processes. Optimal interaction of the entire system Progressive software and improved communication between the generator and matchbox. Real-time measurement of RF power Fast system tracking for every change in the impedance of the matchbox and the load. Closed loop control Optimal monitoring of the process parameters as well as early arc detection. User-friendly process monitoring Graphical user interface and effective tools (Smith diagram, real-time oscilloscope).