RF plasma generator TruPlasma VHF 3000 series

The TruPlasma VHF Series 3000 generators are based on an innovative platform concept that enables the highest level of power density and meets the most demanding process requirements. The modular and purely water-cooled construction enables the output power to be scaled to up to 80 kW. These compact VHF generators are also very cost-effective and have a robust design. Precise and fast arbitrary pulse shapes This provides the best plasma process control for the present single and multi-level pulsing. Minimal ramp time < 150 ns This means extremely flexible control of the generator ignition behavior is possible. Smart auto frequency tuning Automatic frequency tuning for optimal interaction between the generator and the matchbox. Reliable and sophisticated process control Excellent, reproducible process results due to highly precise digital frequency modulation. Independent of cable length The length of the RF cable does not need to be adapted when the process is changed, resulting in short setup times. Robust design Reliable generator function even in the event of mismatch due to CombineLine technology.