RF plasma generator TruPlasma RF 3000 series

RF plasma generator - TruPlasma RF 3000 series - TRUMPF Power electronics
RF plasma generator - TruPlasma RF 3000 series - TRUMPF Power electronics
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Characteristics

Type
RF

Description

With these RF generators you can rest assured the TruPlasma RF Series 3000 stands out for its robust design and high efficiency. This means it is best suited for stable reproducible plasma processes, such as those used during the production of semi-conductors, photovoltaic cells, or flat screens. Installed in thousands of applications around the world, these generators guarantee a high level of productivity and excellent process results. Efficiency and cost-effectiveness Efficiency of up to 80% enables energy costs to be decreased by up to 50%. Excellent RF arc management Safe operation, even of demanding and new processes. Extremely robust and high process stability CombineLine technology: Reliable protection against reflected power in the event of mismatch. Maximum flexibility Continuous or pulsed power output results in diverse applications.

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