The TruPlasma DC Series 3000 (G2) is suitable for a number of DC sputtering processes – including use as a replacement for pulsed process power supplies. This is because progressive arc management offers a guarantee for the best layer qualities and a significantly higher production yield. Because of its extremely compact design you can integrate the water-cooled DC generators very easily into your current application.
Lowest arc energy in its class
Residual energies of < 0.3 mJ/kW guarantee the best layer qualities and high deposition rates.
High power density
Very compact design (19-inch plug-in unit) results in simple integration, even for larger power levels.
Wide power range
Output power of 20 kW to 300 kW, so use as a replacement for larger generators is also possible.
Complete water cooling
Enables long system runtimes and reduces maintenance.
Simple system integration
Variable line voltage (400 V to 480 V) and different data interfaces.