Surface treatment plasma source TruPlasma DC 3000 (G2) series

Surface treatment plasma source - TruPlasma DC 3000 (G2) series - TRUMPF Power electronics
Surface treatment plasma source - TruPlasma DC 3000 (G2) series - TRUMPF Power electronics
Surface treatment plasma source - TruPlasma DC 3000 (G2) series - TRUMPF Power electronics - image - 2
Surface treatment plasma source - TruPlasma DC 3000 (G2) series - TRUMPF Power electronics - image - 3
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Description

The TruPlasma DC Series 3000 (G2) is suitable for a number of DC sputtering processes – including use as a replacement for pulsed process power supplies. This is because progressive arc management offers a guarantee for the best layer qualities and a significantly higher production yield. Because of its extremely compact design you can integrate the water-cooled DC generators very easily into your current application. Lowest arc energy in its class Residual energies of < 0.3 mJ/kW guarantee the best layer qualities and high deposition rates. High power density Very compact design (19-inch plug-in unit) results in simple integration, even for larger power levels. Wide power range Output power of 20 kW to 300 kW, so use as a replacement for larger generators is also possible. Complete water cooling Enables long system runtimes and reduces maintenance. Simple system integration Variable line voltage (400 V to 480 V) and different data interfaces.

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